Electromechanical coupling in suspended nanomechanical resonators with a two-dimensional electron gas

33rd International Conference on the Physics of Semiconductors

Shevyrin, A.A.^1,2 ; Pogosov, A.G.^1,2 ; Bakarov, A.K.^1,2 ; Shklyaev, A.A.^1,2

Rzhanov Institute of Semiconductor Physics SB RAS, Lavrentyeva avenue, 13, Novosibirsk

630090, Russia^1

Novosibirsk State University, Pirogova street, 2, Novosibirsk

630090, Russia^2

关键词: Conductivity changes;    Mechanical stress;    Nanomechanical resonators;    Physical model;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/864/1/012043/pdf
DOI  :  10.1088/1742-6596/864/1/012043

来源: IOP

【 摘 要 】

A physical model describing the piezoelectric-effect-mediated influence of bending of a thin suspended cantilever with a two-dimensional electron gas on the conductivity is proposed. The model shows that the conductivity change is almost entirely caused by the rapid change in mechanical stress near the boundary of suspended and non-suspended areas, rather than by the stress itself. An experiment confirming that the electromechanical coupling is associated with the piezoelectric effect is performed. The experimentally measured conductance sensitivity to the cantilever's vibrations agree with the developed physical model.