Effect of composition on properties of In2O3_Ga2O3 thin films

Mechanical Science and Technology Update

力学;物理学

Demin, I.E.^1 ; Kozlov, A.G.^1

Omsk State Technical University, Mira Ave., 11, Omsk

644050, Russia^1

关键词: Adsorption and desorptions;    Combustible gas;    Gas response;    Gas sensing material;    Gas sensing properties;    Polycrystalline thin film;    Visible range;    Working temperatures;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/858/1/012009/pdf
DOI  :  10.1088/1742-6596/858/1/012009

学科分类：力学，机械学

来源: IOP

【 摘 要 】

The In2O3-Ga2O3mixed oxide polycrystalline thin films with various ratios of components were obtained by pulsed laser deposition. The effect of films composition on surface morphology, electrophysical and gas sensing properties and energies of adsorption and desorption of combustible gases was studied. The films with50%In2O3-50%Ga2O3composition showed maximum gas response (∼25 times) combined with minimum optimal working temperature (∼530 °C) as compared with the other films. The optical transmittance of the films in visible range was investigated. For 50%In2O3-50%Ga2O3films, the transmittance is higher in comparison with the other films. The explanation of the dependency of films behaviors on their composition was presented.The In2O3-Ga2O3films were assumed to have perspectives as gas sensing material for semiconducting gas sensors.