Structure and properties of particles deposited from vacuum arc discharge plasma on the way from the cathode spot up to the walls of a vacuum chamber

13th International Conference on Films and Coatings

Smolanov, N.A.^1

Mordovia State University, Saransk, Russia^1

关键词: Arc discharge plasmas;    Electric and magnetic fields;    Fractal structures;    Micro particles;    Possible mechanisms;    Structure and properties;    Vacuum arc discharges;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/857/1/012043/pdf
DOI  :  10.1088/1742-6596/857/1/012043

来源: IOP

【 摘 要 】

The author has analyzed the structure and properties of micro-particles, which are deposited from arc discharge plasma near the cathode on the substrate and walls of the vacuum chamber. Cathode was grade BT1.0 titanium spraying in nitrogen and acetylene. Particles and films formed in plasma flow with superposing of electric and magnetic fields. The dependence of physical properties of microparticles on the operation modes of the cathode pack has been analyzed. Possible mechanisms for forming fractal structures in vacuum arc discharge plasma have been considered.