Structure and morphology of Sn1-xAlxO2 thin films prepared by spray pyrolysis technique

Frontiers of Physics and Plasma Science

Bhatia, G.^1 ; Gupta, V.K.^1 ; Shrivastava, S.B.^1 ; Patidar, M.M.^2 ; Ganesan, V.^2

School of Studies in Physics, Vikram University, Ujjain, MP

456010, India^1

UGC-DAE CSR, Khandwa Road, Indore - , MP

452001, India^2

关键词: Al substitution;    Al-concentration;    Glass substrates;    Polycrystalline;    Spray-pyrolysis techniques;    Structural and morphological properties;    Structure and morphology;    Tetragonal structure;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/836/1/012049/pdf
DOI  :  10.1088/1742-6596/836/1/012049

来源: IOP

【 摘 要 】

Al-doped tin oxide [Sn1-xAlxO2(x=0, 0.03 and 0.09)] thin films were prepared by spray pyrolysis technique (SPT) on glass substrate. XRD and AFM techniques have been used for the investigation of structural and morphological properties of the films. XRD spectra reveal the polycrystalline nature of the films having tetragonal structure. AFM images show an evolution in the morphology in the sense that larger grains of SnO2are converted in some smaller grains upon Al inclusion. This may be due to the strain developed due to the Al substitution. The roughness has been found to decrease with the increase in Al concentration.