Fabrication of SnO2 based CO gas sensor device using thick film technology

8th International Conference on Physics and its Applications

Hermida, I.D.P.^1 ; Wiranto, G.^1 ; Hiskia^1 ; Nopriyanti, R.^2

Telecommunication Division, Research Center for Electronics, Telecommunications Indonesian Institute of Sciences (P2ET-LIPI), Jl. Sangkuriang, Gedung 20, Lantai 4, Bandung

40135, Indonesia^1

Department of Physics, University of Educations, Jl. Dr.Setiabudhi No.229, Bandung

40154, Indonesia^2

关键词: Alumina substrates;    Effect of temperature;    Increasing temperatures;    Morphology and composition;    Operational temperature;    Sensitivity values;    Sensor sensitivity;    Thick film technology;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/776/1/012061/pdf
DOI  :  10.1088/1742-6596/776/1/012061

来源: IOP

【 摘 要 】

This research was aimed at fabricating a CO gas sensor based on SnO2material synthesized using sol-gel method. The sensor components include thin film gold electrode and a PdAg heater screen printed on the backside of the alumina substrate. The device was tested to study the effect of temperature variation on the resistivity of the heater component, and the response of the SnO2sensitive layer to 10 ppm CO gas. The SnO2layer was characterized using SEM and EDS to determine the morphology and composition of the material. It was found that the SnO2sensitive layer contained 21.21% C atoms, 22.43% O atoms, 14.98% Si atoms, 0.34% Cr atoms, 1.16% Ag atoms, 1.78% Sn atoms, and 38.11% Au atoms. The sensor sensitivity to CO gas increased with increasing temperature. The Operational temperature of this sensor was 95° C with the highest sensitivity value obtained was 16.59.