MEMS ion-sorption high vacuum pump

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Grzebyk, T.^1 ; Knapkiewicz, P.^1 ; Szyszka, P.^1 ; Gorecka-Drzazga, A.^1 ; Dziuban, J.A.^1

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 11/17 Janiszewskiego Str., Wroclaw

50-372, Poland^1

关键词: Electric and magnetic fields;    High vacuum;    Ion sorption;    Micro pump;    Pumping cells;    Vertical dimensions;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012047/pdf
DOI  :  10.1088/1742-6596/773/1/012047

来源: IOP

【 摘 要 】

In the article a miniature MEMS-type ion-sorption vacuum pump has been presented. The influence of electric and magnetic field, as well as horizontal and vertical dimensions of the micropump and type of material used for electrodes on the pump properties has been investigated. It has been found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and pumping cell is larger than 1x1x1 mm3. The pump allows generating vacuum at the level of 10-7-10-9hPa in 100 mm3volume.