A simple electrochemical micropump: Design and fabrication

3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016)

Uvarov, I.V.^1 ; Lemekhov, S.S.^1 ; Melenev, A.E.^1 ; Naumov, V.V.^1 ; Koroleva, O.M.^1 ; Izyumov, M.O.^1 ; Svetovoy, V.B.^1,2

Yaroslavl Branch, Institute of Physics and Technology RAS, Universitetskaya Street 21, Yaroslavl

150007, Russia^1

MESA+ Institute for Nanotechnology, University of Twente, PO 217, Enschede

7500 AE, Netherlands^2

关键词: Fabrication procedure;    Glass substrates;    Metallic electrodes;    Micro pump;    Termination time;    Voltage polarity;    Water electrolysis;    Working chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/741/1/012167/pdf
DOI  :  10.1088/1742-6596/741/1/012167

来源: IOP

【 摘 要 】

A micropump based on water electrolysis with a fast change of voltage polarity is presented. It is designed to demonstrate a new pumping principle with the gas termination time as short as 100 microseconds. The device consists of a working chamber with metallic electrodes, inlet and outlet diffusers, and channels for liquid. The chamber and the channels are filled with the electrolyte, which is the pumped liquid. The pump is fabricated on a glass substrate with the deposited metallic electrodes. The substrate is bonded with a polydimethylsiloxane structure containing the channels and the chamber. Design, fabrication procedure and preliminary testing of the device are described.