Optimization of power output in planar thermoelectric microgenerators based on Si nanowires

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Calaza, C.^1 ; Donmez, I.^1 ; Salleras, M.^1 ; Gadea, G.^2 ; Santos, J.D.^2 ; Morata, A.^2 ; Tarancón, A.^2 ; Fonseca, L.^1

IMB-CNM, CSIC, Campus UAB, Barcelona, Bellaterra

08193, Spain^1

Catalonia Institute for Energy Research (IREC), Barcelona

08930, Spain^2

关键词: Active material;    Device design;    Electrical performance;    Fabrication process;    MEMS fabrication;    Microgenerators;    Power out put;    Silicon nanowires;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012026/pdf
DOI  :  10.1088/1742-6596/773/1/012026

来源: IOP

【 摘 要 】

This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.