Grain boundary scattering contribution to the thermopower in Cr-Si nanocrystalline films

18th International Conference PhysicA.SPb

Novikov, S.V.^1 ; Burkov, A.T.^1,2

Ioffe Institute, Polytechnicheskaya 26, Saint-Petersburg

194021, Russia^1

St.Petersburg National Research University of Information Technologies, Mechanics and Optics, Kronverkskiy pr, 49, Saint-Petersburg

197101, Russia^2

关键词: Amorphous structures;    As-deposited films;    Composite target;    Crystal grain size;    Grain boundary scattering;    Nano-crystalline films;    Nanocrystalline composite;    Nanocrystalline state;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/769/1/012069/pdf
DOI  :  10.1088/1742-6596/769/1/012069

来源: IOP

【 摘 要 】

We study transport properties of Cr1-xSixfilms (x = 0.65, 0.67, 0.72, 0.85), produced by magnetron sputtering of composite targets on unheated Si/SiO2substrates. The as-deposited films have amorphous structure, which can be converted by isothermal annealing into nanocrystalline state with the average crystal grain size of about 15 nm. We found that in the nanocrystalline composites there is an additional large contribution to the thermopower due to energy dependent scattering of the charge carriers on the nanocrystal interfaces. This contribution to the thermopower is strongly dependent on the film composition. The maximum contribution have the films of stoichiometric CrSi2composition.