Effect of Heat Treatment on the Structural Properties of TiO2 Films Produced by Sol-Gel Spin Coating Technique

International Conference on Quantum Science and Applications 2016

Nebi, M.^1 ; Peker, D.^1

Physics Department, Eskisehir Osmangazi University, Eskisehir, Turkey^1

关键词: Anneal temperatures;    Effect of heat treatments;    Glass substrates;    Number of layers;    Sol-gel spin coating;    Technological applications;    TiO2 thin films;    Wide band gap;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/766/1/012026/pdf
DOI  :  10.1088/1742-6596/766/1/012026

来源: IOP

【 摘 要 】

Due to have superior properties as fotocatalyst and have wide band gap, TiO2thin films often investigated by researchers and used by technological applications widely. In this study TiO2films were deposited on glass substrate by Sol-Gel Spin Coating Technic. TiO2films were deposited at different number of layer and then annealed at 400oC, 500oC, and 600oC in air. Effect of anneal temperature to structural properties were investigated by XRD analysis. It was observed by the light of XRD results that the structural properties of films had changed by anneal temperature.