A 3D Polymer Based Printed Two-Dimensional Laser Scanner

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Oyman, H.A.^1,2 ; Gokdel, Y.D.^2 ; Ferhanoglu, O.^3 ; Yalcinkaya, A.D.^1

Boazii University, Department of Electrical and Electronics Engineering, Bebek, Istanbul

34342, Turkey^1

Istanbul Bilgi University, Department of Electrical and Electronics Engineering, Eyüp, Istanbul

34060, Turkey^2

Istanbul Technical University, Department of Electronics and Communication Engineering, Maslak, Istanbul

34469, Turkey^3

关键词: Cross sectional profiles;    Imaging applications;    Magnetic actuation;    Mechanical performance;    Planar process technology;    Scanning mirror;    Three-dimensional (3D) printing;    Two Dimensional (2 D);   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012024/pdf
DOI  :  10.1088/1742-6596/757/1/012024

学科分类：力学，机械学

来源: IOP

【 摘 要 】

A two-dimensional (2D) polymer based scanning mirror with magnetic actuation is developed for imaging applications. Proposed device consists of a circular suspension holding a rectangular mirror and can generate a 2D scan pattern. Three dimensional (3D) printing technology which is used for implementation of the device, offers added flexibility in controlling the cross-sectional profile as well as the stress distribution compared to the traditional planar process technologies. The mirror device is developed to meet a portable, miniaturized confocal microscope application in mind, delivering 4.5 and 4.8 degrees of optical scan angles at 111 and 267 Hz, respectively. As a result of this mechanical performance, the resulting microscope incorporating the mirror is estimated to accomplish a field of view (FOV) of 350 μm 350 μm.