Metrological characterization of nm-range dynamic etalons using a heterodyne interferometer

2nd Conference on Plasma & Laser Research and Technologies

Kazieva, T.V.^1 ; Kuznetsov, A.P.^1 ; Ponarina, M.V.^1 ; Gubskiy, K.L.^1 ; Reshetov, V.N.^2

National Research Nuclear University MEPhI, Kashirskoye sh. 31, Moscow

115409, Russia^1

Technological Institute for Superhard and Novel Carbon Materials, Tsentralnaya str. 7a, Troitsk, Moscow

142190, Russia^2

关键词: Heterodyne interferometer;    Heterodyne laser interferometers;    Metrological characteristics;    Metrological characterization;    Micro-particles;    Piezoelectric hysteresis;    Piezoelectric modulus;    Scanning probes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/747/1/012059/pdf
DOI  :  10.1088/1742-6596/747/1/012059

来源: IOP

【 摘 要 】

Test structures used for calibration of scanning probe microscopes have certain limitations. They are short-lived, their work surface becomes coated with microparticles over time, and it gradually wears out by contact with the measuring probe, resulting in the etalon geometry deformation. Dynamic etalons allow calibrating SPMs in ranges from pm to nm. In this article we present the results of dynamic etalon metrological characteristics research using an SPM equipped with tree-coordinate heterodyne laser interferometer. Obtained data indicates stability of piezoelectric modulus and absence of piezoelectric hysteresis phenomena in the etalon samples used.