Writing of 3D optical integrated circuits with ultrashort laser pulses in the presence of strong spherical aberration

2nd Conference on Plasma & Laser Research and Technologies

Bukharin, M.A.^1,2 ; Skryabin, N.N.^1,2 ; Khudyakov, D.V.^2,3 ; Vartapetov, S.K.^2,3

Moscow Institute of Physics and Technology, Institutskiy per.9, Dolgoprudny, Moscow Region

141700, Russia^1

Optosystems Ltd., Troitsk, Moscow

142190, Russia^2

Physics Instrumentation Center, Prokhorov General Physics Institute, RAS, Russian Academy of Sciences, Troitsk, Moscow

142190, Russia^3

关键词: Dynamic adjustment;    Extended range;    Integrated optical systems;    Laser-pulse energy;    Novel techniques;    Optical integrated circuits;    Spherical aberrations;    Thermal regimes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/747/1/012054/pdf
DOI  :  10.1088/1742-6596/747/1/012054

来源: IOP

【 摘 要 】

A novel technique was proposed for 3D femtosecond writing of waveguides and optical integrated circuits in the presence of strong spherical aberration, caused by inscription at significantly different depth under the surface of optical glasses and crystals. Strong negative effect of spherical aberration and related asymmetry of created structures was reduced due to transition to the cumulative thermal regime of femtosecond interaction with the material. The differences in the influence of spherical aberration effect in a broad depth range (larger than 200 μm) was compensated by dynamic adjustment of laser pulse energy during the process of waveguides recording. The presented approach has been experimentally implemented in fused silica. Obtained results can be used in production of a broad class of femtosecond written three-dimensional integrated optical systems, inscripted at non-optimal (for focusing lens) optical depth or in significantly extended range of depths.