Thermal conductivity of carbon doped GeTe thin films in amorphous and crystalline state measured by modulated photo thermal radiometry

7th European Thermal-Sciences Conference

Kusiak, Andrzej^1 ; Battaglia, Jean-Luc^1 ; Noé, Pierre^2 ; Sousa, Véronique^2 ; Fillot, F.^2

I2M Laboratory, University of Bordeaux, Talence, France^1

CEA-LETI, MINATEC, Grenoble, France^2

关键词: Amorphous phase;    Amorphous state;    Crystalline films;    Crystalline grain size;    Crystalline state;    Optical reflectivity;    Phase change memory (pcm);    Thermal boundary resistance;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/745/3/032104/pdf
DOI  :  10.1088/1742-6596/745/3/032104

来源: IOP

【 摘 要 】

The thermal conductivity and thermal boundary resistance of GeTe and carbon doped GeTe thin films, designed for phase change memory (PCM) applications, were investigated by modulated photo thermal radiometry. It was found that C doping has no significant effect on the thermal conductivity of these chalcogenides in amorphous state. The thermal boundary resistance between the amorphous films and SiO2substrate is also not affected by C doping. The films were then crystallized by an annealing at 450°C as confirmed by optical reflectivity analysis. The thermal conductivity of non-doped GeTe significantly increases after crystallization annealing. But, surprisingly the thermal conductivity of the crystallized C doped GeTe was found to be similar from that of the amorphous state and independent of C concentration. As for the amorphous phase, C doping does not affect the thermal boundary resistance between the crystalline GeTe films and SiO2substrate. This behaviour is discussed thanks to XRD and FTIR analysis. In particular, XRD shows a decrease of crystalline grain size in crystalline films as C concentration is increased. FTIR analysis of the film before and after crystallization evidenced that this evolution could be attributed to the disappearing of Ge-C bonds and migration of C atoms out of the GeTe phase upon crystallization, limiting then the growth of GeTe crystallites in C-doped films.