Laser formation of tip emitting structures with high aspect ratio on glass-carbon field-emission cathodes

3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016)

Bessonov, D.A.^1 ; Sokolova, T.N.^1 ; Shesterkin, V.I.^2 ; Surmenko, E.L.^1 ; Popov, I.A.^1 ; Chebotarevsky, Yu V.^1

Ed.-Res. Lab. of Laser Technics and Technology, Yuri Gagarin State Technical University of Saratov, Saratov

410054, Russia^1

JSC Research and Production Enterprise Almaz, Saratov

410033, Russia^2

关键词: Carbon plates;    Current emissions;    Fine milling;    High aspect ratio;    Laser scribing;    Nanosecond laser micromachining;    Shaped structures;    Technological route;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/741/1/012166/pdf
DOI  :  10.1088/1742-6596/741/1/012166

来源: IOP

【 摘 要 】

Paper describes the method of creating the sharp emitting tips on the surface of a field- emission cathode. The needle-shaped structures with a high aspect ratio on the glass-carbon plate are produced by means of nanosecond laser micromachining. The operations of laser scribing, milling and cleaning were applied for fabrication of the single- and multi-tip field-emission cathode. The special technique of laser rough and fine milling provided high tips with sharp and smooth apexes. As a result we obtained the tips with aspect ratio up to 600. The tests of cathodes showed that high density of current emission and a shorter technological route of production to be reached.