Stable and environment-hard vacuum nanoelectronic devices for aerospace applications

7th Global Conference on Materials Science and Engineering

工业技术（总论）;材料科学

Nakamoto, M.^1 ; Moon, J.^1

Graduate School of Integrated Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Naka-ku, Shizuoka

432-8011, Japan^1

关键词: Conventional methods;    Current emissions;    Electric propulsion engines;    Electric thruster;    Emitter fabrication;    Low work function;    Vacuum electronic devices;    Vacuum nanoelectronics;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/474/1/012005/pdf
DOI  :  10.1088/1757-899X/474/1/012005

来源: IOP

【 摘 要 】

Extremely stable field-emitter arrays (FEAs) having low work function as well as resisting harsh environments have been prepared by the transfer mold emitter fabrication method to make remarkably resistant and low operation-voltage vacuum nanoelectronic devices in harsh environments such as a strong radical atmosphere. Amorphous carbon and titanium nitride, which have a low work function as well as an environmental hardness, were used as the emitter material. The current emission fluctuations of amorphous carbon FEAs having no resistive layers, were as low as ±1.7%, (the lowest ever reported value), as compared to 5-100% of general FEAs fabricated by the conventional method and containing resistive layers. The amorphous carbon FEAs show the most stable emission characteristics, as compared to transfer mold FEAs coated with titanium nitride or platinum (Pt), because amorphous carbon FEAs have the most uniform tip radii. The amorphous carbon FEAs exhibit stable fluctuations of less than ±5.1% under in situ oxygen radical treatment. Panel and pixel electric thrusters have been proposed that use transfer mold FEAs. These electric thrusters make it easy to produce large and small thrusters. transfer mold amorphous carbon FEAs can be used to create highly efficient and reliable vacuum electronic devices such as electric propulsion engines and field-emission displays.