Laser-Induced Periodical Structures Fabrication for Third Harmonic Generation

3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016)

Voytova, T.A.^1 ; Makarov, S.V.^1 ; Tsypkin, A.N.^1 ; Milichko, V.A.^1 ; Mukhin, I.S.^1 ; Yulin, A.V.^1 ; Putilin, S.E.^1 ; Baranov, M.A.^1 ; Krasnok, A.E.^1 ; Belov, P.A.^1

ITMO University, 49 Kronverksky Pr., St. Petersburg

197101, Russia^1

关键词: Femtosecond irradiation;    High peak power;    Large-scale arrays;    Novel strategies;    Periodical structure;    Self-adjusting;    Silicon nanoparticles;    Thin silicon films;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/741/1/012112/pdf
DOI  :  10.1088/1742-6596/741/1/012112

来源: IOP

【 摘 要 】

We propose a novel strategy for self-adjusted fabrication of large-scale array of resonant silicon nanoparticles (metasurface) on a thin silicon film. The self-adjusting mechanism is based on the effect of resonant nanogratings formation under intense multishot femtosecond irradiation of a thin silicon film. The resulting metasurfaces allow for generation of ultraviolet laser pulses at a wavelength of 270 nm with conversion efficiency up to 10-6and high peak (≈100 kW/sm2) and average power (≈1.5 μW). Such high peak power from ultrathin metasurface makes the generated UV pulses applicable in a wide range of applications: precise nanolithography, ultrafast photoexcitation etc.