Growth of vertically aligned multiwalled carbon nanotubes forests on metal alloy Ni-Nb-N with low content of catalyst

3rd International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint Petersburg OPEN 2016)

Dubkov, S.^1 ; Trifonov, A.^1,2 ; Shaman, Yu^3 ; Pavlov, A.^4 ; Shulyat'Ev, A.^1 ; Skorik, S.^3 ; Kirilenko, E.P.^1 ; Rygalin, B.^1

National Research University of Electronic Technology, Zelenograd

124498, Russia^1

Federal State Unitary Enterprise Lukin Research Institute of Physical Problems, Zelenograd

124460, Russia^2

NPK Technological Center, Zelenograd

124498, Russia^3

Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences, Moscow

115487, Russia^4

关键词: Amorphous metal alloys;    CVD method;    Energy dispersive x-ray;    Low nickels;    Metal alloys;    Vertically aligned;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/741/1/012030/pdf
DOI  :  10.1088/1742-6596/741/1/012030

来源: IOP

【 摘 要 】

This research shows the possibility of carbon nanotubes (CNTs) formation on the surface of low nickel (∼ 10 at.%) Ni-Nb-N amorphous metal alloy film by CVD method at 550 °C of the gas mixture based on acetylene. The structure of CNT were studied by transmission and scanning-electron microscopy, energy-dispersive X-ray and the Raman spectroscopy.