Change of energy state in the surface layer at the stages of vacuum ion-plasma treatment process

23rd International Conference on Vacuum Technique and Technology

Plikhunov, V.V.^1 ; Petrov, L.M.^1

JSC, National Institute of Aviation Technologies, Moscow, Russia^1

关键词: Contact potential difference;    Ion plasma treatment;    Ion plasmas;    Plasma streams;    Surface conditions;    Surface layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012011/pdf
DOI  :  10.1088/1742-6596/729/1/012011

来源: IOP

【 摘 要 】

Change of energy state in the surface layer under treatment at the stages of vacuum ion-plasma process is discussed. It is demonstrated that the most informative way to obtain data on the surface condition after the action of plasma streams is a method of contact potential difference used for evaluation of the energy state of the surface. Different examples of the application of this method to evaluate the surface energy state and to determine effectiveness of plasma streams action are presented.