The water outgassing rate of internal surfaces of vacuum systems

23rd International Conference on Vacuum Technique and Technology

Rozanov, L.N.^1

St. Petersburg Polytechnic University, Polytechnicheskaya st. 29, St. Petersburg

195251, Russia^1

关键词: Adsorbed gas;    Adsorption heats;    Adsorption properties;    Geometrical surfaces;    Heat of adsorption;    Internal surfaces;    Outgassing rate;    Vacuum system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012001/pdf
DOI  :  10.1088/1742-6596/729/1/012001

来源: IOP

【 摘 要 】

On the basis of experimental adsorption isotherm the ratio between the real and geometrical surfaces was calculated and the amount of gas required to form a monolayer was defined. Simultaneous usage of Henry and Frendlih equations allowed to determine the dependence of the heat of adsorption on the logarithm of the absorbed gas amount A mathematical model of pumping of the vacuum systems with adsorbing walls is presented. This model uses the parameters of the vacuum system and the dependence of the adsorption heat on the amount of the adsorbed gas .The conditions of the existence of regular pumping regime are discussed. The structure database vacuum adsorption properties of materials was proposed. The experimental data on the determination of the adsorption outgassing rate were released.