Sensor for the working surface cleanliness definition in vacuum

23rd International Conference on Vacuum Technique and Technology

Deulin, E.A.^1 ; Mashurov, S.S.^2 ; Gatsenko, A.A.^2

Moscow State Technical University, Russia^1

CJSC Aerospace Monitoring and Technologies (CJSC AMT), Russia^2

关键词: Adsorbed gas;    Modern development;    Modern science;    Molecular layer;    Output parameters;    Surface cleanliness;    Technological process;    Vacuum system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012022/pdf
DOI  :  10.1088/1742-6596/729/1/012022

来源: IOP

【 摘 要 】

Modern development of nanotechnology as one of the modern science priority directions is impossible to imagine without the use of vacuum systems and technologies. And the better the vacuum (lower the pressure), the "cleaner" we get a surface, which is very important for nanotechnology. Determination of the cleanliness of the surface or the amount of molecular layers of adsorbed gases on the working surface of the products especially in industry, where the cleanliness of the working surface is a key parameter of the technological process and has a significant influence on the output parameters of the final product is the main goal of this work.