Optical characterization of Sol-Gel ZnO:Al thin films

19th International Summer School on Vacuum, Electron and Ion Technologies

Ivanova, T.^1 ; Harizanova, A.^1 ; Koutzarova, T.^2 ; Vertruyen, B.^3

Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

1784, Bulgaria^1

Emil Djakov Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

1784, Bulgaria^2

LCIS/SUPRATECS, Institute of Chemistry B6, University of Liege, Sart-Tilman, Liege

B-4000, Belgium^3

关键词: Effect of annealing;    Fourier transform infrared;    Optical characterization;    Polycrystalline structure;    Structural evolution;    Technological process;    UV-vis spectrophotometry;    Visible spectral range;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/700/1/012048/pdf
DOI  :  10.1088/1742-6596/700/1/012048

来源: IOP

【 摘 要 】

This paper presents a sol-gel technological process for preparing thin films of ZnO and ZnO:Al. The effect of annealing treatments (500, 600, 700 and 800°C) on their properties was studied. The structural evolution with the temperature was investigated by using X-Ray diffraction (XRD). Fourier Transform Infrared (FTIR) and UV-VIS spectrophotometry were applied to characterizing the films' vibrational and optical properties. The ZnO and ZnO:Al films possessed a polycrystalline structure. The films studied are highly transparent in the visible spectral range. The optical band gap values and the haze parameter were also determined.