Comparative study of RF reactive magnetron sputtering and sol-gel deposition of UV induced superhydrophilic TiOx thin films

19th International Summer School on Vacuum, Electron and Ion Technologies

Vrakatseli, V.E.^1 ; Amanatides, E.^1 ; Mataras, D.^1

Plasma Technology Laboratory, Department of Chemical Engineering, University of Patras, Greece^1

关键词: Comparative studies;    Low temperatures;    Natural sunlight;    Photoinduced hydrophilicity;    RF reactive magnetron sputtering;    Similar time periods;    Sol-gel deposition;    Super-hydrophilic;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/700/1/012039/pdf
DOI  :  10.1088/1742-6596/700/1/012039

来源: IOP

【 摘 要 】

TiOxand TiOx-like thin films were deposited on PEEK (Polyether ether ketone) substrates by low-temperature RF reactive magnetron sputtering and the sol-gel method. The resulting films were compared in terms of their properties and photoinduced hydrophilicity. Both techniques resulted in uniform films with good adhesion that can be switched to superhydrophilic after exposure to UVA radiation for similar time periods. In addition, the sputtered films can also be activated and switched to superhydrophilic by natural sunlight due to the higher absorption in the visible spectrum compared to the sol-gel films. On the other hand, the as deposited sol-films remain relatively hydrophilic for a longer time in dark compared to the sputtered film due to the differences in the morphology and the porosity of the two materials. Thus, depending on the application, either method can be used in order to achieve the desirable TiOxproperties.