Electron beam characterization by a tomographic approach

19th International Summer School on Vacuum, Electron and Ion Technologies

Koleva, E.^1,2 ; Mladenov, G.^1 ; Todorov, D.^1 ; Koleva, L.^2 ; Kardjiev, M.^1

Emil Djakov Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

1784, Bulgaria^1

University of Chemical Technology and Metallurgy, 8 Kliment Ohridski blvd., Sofia

1756, Bulgaria^2

关键词: Beam currents;    Beam distribution;    Beam emittance;    Current density distribution;    Electron-beam parameters;    Measuring device;    Radial currents;    Standard deviation;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/700/1/012013/pdf
DOI  :  10.1088/1742-6596/700/1/012013

来源: IOP

【 摘 要 】

In this paper, experimental data are analyzed for the integral current density distribution when the electron beam parameters are varied, namely, focusing current, beam current, venelt voltage and the distance to the measuring device. The 3D beam radial current density distribution is reconstructed by implementing a tomographic approach. The characterization of the electron beam is considered in connection with the estimation of the following parameters: the radial and the angular beam distribution standard deviations, the position of the beam focus and the beam emittance.