Direct Femtosecond Laser Writing of Optical Nanoresonators

17th Russian Youth Conference on Physics of Semiconductors and Nanostructures, Opto- and Nanoelectronics

Dmitriev, P.A.^1 ; Makarov, S.V.^1 ; Milichko, V.A.^1 ; Mukhin, I.S.^1,2 ; Samusev, A.K.^1,3 ; Krasnok, A.E.^1 ; Belov, P.A.^1

ITMO University, St. Petersburg

197101, Russia^1

St. Petersburg Academic University, St. Petersburg

194021, Russia^2

Ioffe Physical-Technical Institute, Russian Academy of Sciences, St. Petersburg

194021, Russia^3

关键词: Femtosecond laser writing;    Large scale lasers;    Laser scanning;    Nanoresonators;    Single-step;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/690/1/012021/pdf
DOI  :  10.1088/1742-6596/690/1/012021

来源: IOP

【 摘 要 】

A novel method for single-step, lithography-free, and large-scale laser writing of arrays of metallic (Au) and semiconductor (Si) nanoparticles (nanoresonators) has been developed. Changing energy of femtosecond laser pulses and film thickness it is possible to vary diameter of the nanoparticles, while the distance between them can be varied by laser scanning parameters. This method has an advantage over the most previously demonstrated methods in its simplicity and versatility, while the quality of the structures is good enough for many applications.