Chemical vapour deposition growth and Raman characterization of graphene layers and carbon nanotubes

INERA Conference 2015: Light in Nanoscience and Nanotechnology

Lai, Y.-C.^1 ; Rafailov, P.M.^2 ; Vlaikova, E.^2 ; Marinova, V.^1,3 ; Lin, S.H.^4 ; Yu, P.^1 ; Yu, S.-C.^1 ; Chi, G.C.^1 ; Dimitrov, D.^2,3 ; Sveshtarov, P.^2 ; Mehandjiev, V.^2 ; Gospodinov, M.M.^2

Department of Photonics, National Chiao Tung University, Hsinchu

30010, Taiwan^1

Institute of Solid State Physics, BAS, 72 Tzarigradsko Chaussee blvd., Sofia

1784, Bulgaria^2

Institute of Optical Materials and Technologies, BAS, Sofia

1113, Bulgaria^3

Department of Electrophysics, National Chiao Tung University, Hsinchu

30010, Taiwan^4

关键词: Chemical vapour deposition;    Graphene films;    Graphene layers;    Ni Nanoparticles;    Optimal growth;    Plasma enhancement;    Raman characterization;    Vertically aligned;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/682/1/012009/pdf
DOI  :  10.1088/1742-6596/682/1/012009

来源: IOP

【 摘 要 】

Single-layer graphene films were grown by chemical vapour deposition (CVD) on Cu foil. The CVD process was complemented by plasma enhancement to grow also vertically aligned multiwalled carbon nanotubes using Ni nanoparticles as catalyst. The obtained samples were characterized by Raman spectroscopy analysis. Nature of defects in the samples and optimal growth conditions leading to achieve high quality of graphene and carbon nanotubes are discussed.