A Novel Atomic Force Microscope with Multi-Mode Scanner

5th International Conference on Advances in Optoelectronics and Micro/Nano-optics

Qin, Chun^1 ; Zhang, Haijun^1 ; Xu, Rui^1 ; Han, Xu^1 ; Wang, Shuying^1

State Key Laboratory of Modem Optical Instrumentation, Zhejiang University, Hangzhou

310027, China^1

关键词: Fluctuation structures;    High resolution;    High resolution scanning;    Multimodes;    Range scanning;    Scanning mode;    Small samples;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/680/1/012009/pdf
DOI  :  10.1088/1742-6596/680/1/012009

来源: IOP

【 摘 要 】

A new type of atomic force microscope (AFM) with multi-mode scanner is proposed. The AFM system provides more than four scanning modes using a specially designed scanner with three tube piezoelectric ceramics and three stack piezoelectric ceramics. Sample scanning of small range with high resolution can be realized by using tube piezos, meanwhile, large range scanning can be achieved by stack piezos. Furthermore, the combination with tube piezos and stack piezos not only realizes high-resolution scanning of small samples with large- scale fluctuation structure, but also achieves small range area-selecting scanning. Corresponding experiments are carried out in terms of four different scanning modes showing that the AFM is of reliable stability, high resolution and can be widely applied in the fields of micro/nano-technology.