Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

Electron Microscopy and Analysis Group Conference 2015

Sharp, J.^1 ; Muller, I. Castillo^1 ; Mandal, P.^2 ; Abbas, A.^3 ; West, G.^3 ; Rainforth, W.M.^1 ; Ehiasarian, A.^2 ; Hovsepian, P.^2

Dept. of Materials Science and Engineering, University of Sheffield, Sir Robert Hadfield Building, Mappin St., Sheffield

S1 3JD, United Kingdom^1

Materials and Engineering Research Institute, Sheffield Hallam University, City Campus, Howard Street, Sheffield

S1 1WB, United Kingdom^2

Department of Materials, Loughborough University, Loughborough

LE11 3TU, United Kingdom^3

关键词: Between clusters;    Carbon coating;    Columnar grain;    Cross-sectional TEM;    Doped carbons;    Energy dispersive X ray spectroscopy;    High power impulse magnetron sputtering (HIPIMS);    Wear resistant;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/644/1/012011/pdf
DOI  :  10.1088/1742-6596/644/1/012011

来源: IOP

【 摘 要 】

A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.