The absolute calibration of high-precision optical flats across a wide range of spatial frequencies

International Scientific Seminars on "Fundamental and Applied Problems of Photonics and Condensed Matter Physics"

Gladysheva, Yana V.^1 ; Zhivotovsky, Ilya V.^1 ; Denisov, Dmitry G.^1 ; Baryshnikov, Nikolay V.^1 ; Karasik, Valery E.^1 ; Rees, Paul^2

Bauman Moscow State Technical University, 2nd Baumanskaya str. 5, Moscow

105005, Russia^1

Glyndwr University, St Asaph Business Park, St Asaph

LL17 0JD, United Kingdom^2

关键词: Absolute calibration;    Calibration method;    High-precision;    Optical flat;    Spatial frequency;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/584/1/012020/pdf
DOI  :  10.1088/1742-6596/584/1/012020

来源: IOP

【 摘 要 】

We analyse the applicability of the two-flat-test calibration method across wide spatial frequency range based on its calculated accuracy. A number of simulations have been performed to determine the accuracy of the absolute calibration. The simulation results show that the two-flat-test calibration method is applicable to surfaces within the spatial frequency range from 1.67×10-1to 1.67×10-3mm-1.