Fine control of the amount of preferential <001> orientation in DC magnetron sputtered nanocrystalline TiO2 films

INERA Workshop: Transition Metal Oxide Thin Films-functional Layers in "Smart windows" and Water Splitting Devices

Stefanov, B.^1 ; Granqvist, C.G.^1 ; Österlund, L.^1

Ångström Laboratory, Department of Engineering Sciences, Uppsala University, PO Box 534, Uppsala

SE-75121, Sweden^1

关键词: Degree of orientation;    Deposition chambers;    Grazing incidence X-ray diffraction;    Nanocrystalline TiO2 films;    Reactive DC magnetron sputtering;    Sputtering methods;    UV/ Vis spectroscopy;    Water solutions;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/559/1/012011/pdf
DOI  :  10.1088/1742-6596/559/1/012011

来源: IOP

【 摘 要 】

Different crystal facets of anatase TiO2are known to have different chemical reactivity; in particular the {001} facets which truncates the bi-tetrahedral anatase morphology are reported to be more reactive than the usually dominant {101} facets. Anatase TiO2thin films were deposited by reactive DC magnetron sputtering in Ar/O2atmosphere and were characterized using Rietveld refined grazing incidence X-ray diffraction, atomic force microscopy and UV/Vis spectroscopy. By varying the partial O2 pressure in the deposition chamber, the degree of orientation of the grains in the film could be systematically varied with preferredorientation changing from random upto 39% as determined by March-Dollase method. The orientation of the films is shown to correlate with their reactivity, as measured by photo-degradation of methylene blue in water solutions. The results have implications for fabrication of purposefully chemically reactive thin TiO2films prepared by sputtering methods.