Ion implantation induced modification of ta-C films

18th International School on Condensed Matter Physics: "Challenges of Nanoscale Science: Theory, Materials, Applications"

Sandulov, M.^1 ; Berova, M.^1 ; Tsvetkova, T.^1

Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

1784, Bulgaria^1

关键词: Absorption co-efficient;    Filtered cathodic vacuum arc;    High density optical data storage;    Optical absorption edge;    Optical transmission measurements;    Photo darkening effects;    Structural modifications;    Tetrahedral amorphous carbon (ta-C);   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/558/1/012044/pdf
DOI  :  10.1088/1742-6596/558/1/012044

来源: IOP

【 摘 要 】

Thin film samples (d∼40nm) of tetrahedral amorphous carbon (ta-C), deposited by filtered cathodic vacuum arc (FCVA), have been implanted with N+at ion energy E 20 keV and ion dose D 3.1014cm-2. The induced structural modification of the implanted material results in a considerable change of its optical properties, best manifested by a significant shift of the optical absorption edge to lower photon energies as obtained from optical transmission measurements. This shift is accompanied by a considerable increase of the absorption coefficient (photo-darkening effect) in the measured photon energy range (0.5÷3.0 eV). These effects could be attributed both to additional defect introduction and increased graphitization, as confirmed by IR and Raman measurements. The optical contrast thus obtained (between implanted and unimplanted film material) could be made use of for information archiving, in the area of high-density optical data storage while using focused ion nano-beams.