MEMS wireless temperature sensor for combustion studies

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Lee, Minhyeok^1 ; Kawahara, Yoshihiro^2,3 ; Morimoto, Kenichi^1 ; Suzuki, Yuji^1

Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo

113-8656, Japan^1

Department of Information and Communication Engineering, University of Tokyo, Japan^2

JST, Presto, Japan^3

关键词: Electrical resistance change;    Equivalent circuit model;    Inductive couplings;    Measured temperatures;    Prototype sensor;    Sensor configurations;    Temperature increase;    Wireless temperature sensors;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012077/pdf
DOI  :  10.1088/1742-6596/557/1/012077

来源: IOP

【 摘 要 】

A MEMS wireless wall temperature sensor for combustion studies is proposed. Electrical resistance change in a LCR circuit is used to measure the temperature through inductive coupling the sensor coil and the read-out coil. Equivalent circuit model and 3-D electromagnetic simulation are employed to design sensor configuration. The resonant frequency is increased with increasing the resistance due to the temperature increase. The prototype sensor was successfully fabricated with MEMS technologies. The impedance phase angle shows a sharp dip at the resonant frequency, which is in good accordance with the equivalent circuit model. The measured temperature sensitivity is found to be as high as 6 kHz/K, when the distance between the read-out and the sensor coils is 0.71 mm.