A tree-on-a-chip: design and analysis of MEMS-based superheated loop heat pipes exploiting nanoporous silicon membranes

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Chen, I.-T.^1 ; Stroock, A.D.^1,2

School of Chemical and Biomolecular Engineering, Cornell University, Ithaca

NY, United States^1

Kavli Institute at Cornell for Nanoscale Science, Cornell University, Ithaca

NY, United States^2

关键词: Conventional design;    Design and analysis;    Film condensations;    Nano-porous silicon;    Nanoporous membrane;    Operating principles;    Silicon membranes;    Superheated liquids;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012067/pdf
DOI  :  10.1088/1742-6596/557/1/012067

来源: IOP

【 摘 要 】

This paper reports the design, fabrication and analysis of a plant-inspired, MEMS- based superheated loop heat pipe (SHLHP) that would exploit nanoporous membranes to allow for operation with large capillary pressures and superheated liquid. The operating principles of SHLHPs differ from conventional designs in 1) the un-coupling of the working fluid from its saturation curve to eliminate limitations associated with temperature head and sub-cooling conditions and 2) the possibility of maintaining sub-saturation throughout the device to eliminate film condensation and improve the condenser thermal conductivity. Nanoporous silicon membranes integrated with DRIE channels are fabricated and characterized. The ability of the membrane to hold liquid under tension is tested by equilibrating water-filled device with various relative humidity and observing the cavitation events within individual voids underneath the membrane. Silicon membranes with desired functionality are further incorporated with patterned glass substrates to form prototype MEMS-based SHLHPs.