Optimization and Experiment of Electromagnetic Energy Harvester by Using NdFeB Sputtered on High-aspect-ratio Corrugated Si

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Yamaguchi, K.^1 ; Tanaka, Y.^1 ; Fujita, T.^1 ; Takehira, N.^1 ; Sonoda, K.^1 ; Kanda, K.^1 ; Maenaka, K.^1

Department of EECS, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Hyogo, Himeji

671-2280, Japan^1

关键词: Design optimization;    FEM simulations;    Finite element method analysis;    High aspect ratio;    Induced electromotive force;    MEMS (microelectromechanical systems);    MEMS fabrication;    Vibration condition;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012056/pdf
DOI  :  10.1088/1742-6596/557/1/012056

来源: IOP

【 摘 要 】

This paper shows a design optimization of MEMS (Microelectromechanical Systems) electromagnetic energy harvester by using finite element method (FEM) analysis to obtain a maximum generated power. The electromagnetic energy harvester consists of the sputtered NdFeB magnet film on a high-aspect-ratio corrugated Si structure and a counter Au serpentine coil. The each dimension of the device is optimally designed by using FEM simulation. After the prototyping with MEMS fabrication process, the measurement results of the power generation are 2.65 mV of the induced electromotive force and 7.60 nW of the output power with optimum load resistance of 231 Ω at the vibration condition of 100 Hz, 294 μmp-p.