Electromagnetic Energy Harvester by Using NdFeB Sputtered on High Aspect Ratio Si Structure

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Tanaka, Y.^1 ; Fujita, T.^1 ; Kotoge, T.^1 ; Yamaguchi, K.^1 ; Sonoda, K.^1 ; Kanda, K.^1 ; Maenaka, K.^1

Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan^1

关键词: Design optimization;    FEM analysis;    High aspect ratio;    Maximum output power;    Optimized designs;    Theoretical calculations;    Vibration amplitude;    Vibration frequency;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012095/pdf
DOI  :  10.1088/1742-6596/476/1/012095

来源: IOP

【 摘 要 】

This study addresses the design optimization of the electromagnetic energy harvester consisting of the sputtered NdFeB film on a high aspect ratio corrugated Si structure and Au electroplated serpentine coil. The high-aspect-ratio Si structure has advantages that the magnetic flux density change is caused by distance change between the coil and magnet film on the fine-patterned corrugated Si, and it is easier to fabricate with high yield than previous study. We also optimized design parameters such as width and depth of the trench, coil size by using FEM analysis and theoretical calculations. Assuming the mass size of 10×10 mm2, the trench depth of the 400 μm, the vibration amplitude of 40 μmp-p and the vibration frequency of 100 Hz, the maximum output power of 12 nW and the maximum electromotive force of 4 mV are obtained for 60 μm and 80 μm magnet widths, respectively.