White Noise Responsiveness of an AlN Piezoelectric MEMS Cantilever Vibration Energy Harvester

14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Jia, Y.^1 ; Seshia, A.A.^1

Nanoscience Centre, University Cambridge, Cambridge

CB3 OFF, United Kingdom^1

关键词: Input vibrations;    Instantaneous power;    Peak power;    Piezoelectric MEMS;    Power out put;    Resonant response;    Si process;    Single frequency;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/557/1/012037/pdf
DOI  :  10.1088/1742-6596/557/1/012037

来源: IOP

【 摘 要 】

This paper reports the design, analysis and experimental characterisation of a piezoelectric MEMS cantilever vibration energy harvester, the enhancement of its power output by adding various values of end mass, as well as assessing the responsiveness towards white noise. Devices are fabricated using a 0.5 μm AlN on 10 μm doped Si process. Cantilevers with 5 mm length and 2 mm width were tested at either unloaded condition (MC0: fn577 Hz) or subjected to estimated end masses of 2 mg (MC2: fn129 Hz) and 5 mg (MC5: fn80 Hz). While MC0 was able to tolerate a higher drive acceleration prior to saturation (7 g with 0.7 μW), MC5 exhibited higher peak power attainable at a lower input vibration (2.56 μW at 3 ms-2). MC5 was also subjected to band-limited (10 Hz to 2 kHz) white noise vibration, where the power response was only a fraction of its resonant counterpart for the same input: peak instantaneous power >1 μW was only attainable beyond 2 g of white noise, whereas single frequency resonant response only required 2.5 ms-2. Both the first resonant response and the band-limited white noise response were also compared to a numerical model, showing close agreements.