Development of Piezoelectric MEMS Vibration Energy Harvester Using (100) Oriented BiFeO3 Ferroelectric Film

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Murakami, S.^1 ; Yoshimura, T.^2 ; Satoh, K.^1 ; Wakazono, K.^2 ; Kariya, K.^2 ; Fujimura, N.^2

Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Osaka 594-1157, Izumi, Japan^1

Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Osaka 599-8531, Sakai, Japan^2

关键词: Maximum output power densities;    Micro-electrical mechanical systems;    Piezoelectric film;    Piezoelectric MEMS;    Piezoelectric vibration;    Resonance frequencies;    Unimorph structure;    Vibration energy harvesters;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012007/pdf
DOI  :  10.1088/1742-6596/476/1/012007

来源: IOP

【 摘 要 】

Piezoelectric vibration energy harvesters (VEHs) with unimorph structure have been developed using Si micro-electrical mechanical systems (MEMS) technology. Since we revealed that (100) epitaxial BiFeO3(BFO) piezoelectric films have high figure-of-merit on energy conversion, (100)-oriented BFO films have been prepared on (100)-oriented LaNiO3bottom electrodes by the sol-gel method. We fabricated the piezoelectric VEHs using BFO films with resonance frequencies of ∼100 Hz. The maximum output power density of these VEHs was determined to be 10.5 μWmm-3G-2(G=9.8 ms-2) at a load resistance of 1 MΩ, which exceeds or is comparable to those of the best-performing VEHs using other piezoelectric films.