A practical approach to quantify the ADF detector in STEM

Electron Microscopy and Analysis Group Conference 2013

He, D.S.^1 ; Li, Z.Y.^1

Nanoscale Physics Research Laboratory, School of Physics and Astronomy, University of Birmingham, Birmingham B15 2TT, United Kingdom^1

关键词: Beam currents;    Black level;    Dark field;    Efficiency maps;    Non-uniform;    Scanning transmission electron microscopes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/522/1/012017/pdf
DOI  :  10.1088/1742-6596/522/1/012017

来源: IOP

【 摘 要 】

We present a practical approach to quantify the annular dark field (ADF) detector in scanning transmission electron microscope (STEM). The non-uniform response of the detector as a function of the beam current is investigated. The brightness and contrast of the preamplifier have been taken into account to find the black level of the detector. The efficiency map is obtained.