Development of a Compact Scanning Transmission X-Ray Microscope

1st Conference on Light and Particle Beams in Materials Science 2013

物理学;材料科学

Takeichi, Y.^1 ; Inami, N.^1 ; Suga, H.^2 ; Ueno, T.^3 ; Kishimoto, S.^1 ; Takahashi, Y.^2 ; Ono, K.^1

Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan^1

Department of Earth and Planetary Systems Science, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan^2

National Institute for Material Science, 1-2-1 Sengen, Tsukuba Ibaraki 305-0047, Japan^3

关键词: Compact size;    Control electronics;    Fast data acquisition;    Hardware design;    Precise positioning;    Test samples;    Transmission x-rays;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/502/1/012009/pdf
DOI  :  10.1088/1742-6596/502/1/012009

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

We report a compact scanning transmission X-ray microscope newly designed and developed at the Photon Factory. The microscope has very compact size and is equipped with fully digitized control electronics to realize high stability, precise positioning and fast data acquisition. The hardware design of the microscope is described in detail. Results of measurement using test samples are also presented.