Piezo control for 1 nm spatial resolution synchrotron X-ray microscopy

17th Pan-American Synchrotron Radiation Instrumentation Conference

Gofron, K.J.^1 ; Lauer, K.^1 ; Nazaretski, E.^1 ; Yan, H.^1 ; Kalbfleisch, S.^1 ; Greer, A.^2 ; Dalesio, B.^1 ; Chu, Y.S.^1

National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, United States^1

Observatory Sciences Ltd., Cambridge CB4 0WX, United Kingdom^2

关键词: Control environment;    Multilayer Laue lens;    Nano-focusing;    Nano-positioning stages;    Spatial resolution;    Stick slip motion;    Synchrotron x rays;    Travel distance;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/493/1/012026/pdf
DOI  :  10.1088/1742-6596/493/1/012026

来源: IOP

【 摘 要 】

A novel motion control system which utilizes the Power PMAC controller from Delta Tau Data Systems Inc., has been developed for positioning with 1 nm spatial resolution. Present work is a significant step forward towards commissioning of the X-ray microscope which will operate at the Hard X-ray Nanoprobe (HXN) beamline at the NSLS-II. The control system is capable of performing high-speed / high-accuracy on-the-fly scans of the sample with respect to the nano-focusing optics e.g. Multilayer Laue Lenses (MLL) or Fresnel X-ray Zone Plates (ZP) [1]. The Power PMAC controls piezoelectric-based nano-positioning stages using piezo-expansion for short range motion and stick-slip motion for longer travel distances. An EPICS interface to the Power PMAC has been developed allowing for easy integration into a beamline control environment.