Challenges in Measurement of Surface Topography beyond Micro-scale

14th International Conference on Metrology and Properties of Engineering Surfaces

Goto, T.^1

Mitutoyo Corp., SE-Sankyo Bldg., Kita-ku Kita 7-jyo Nishi 1-chome 1-2, Sapporo, Japan^1

关键词: 3-D surface measurement;    Industrial manufacturing;    Industrial product;    Measurement system;    Measuring machines;    Micrometer scale;    Non-contact sensing;    Precise measurements;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/483/1/012001/pdf
DOI  :  10.1088/1742-6596/483/1/012001

来源: IOP

【 摘 要 】

Precision measuring machine manufacturers have been flooded with requests for more precise measurements. Not only high-accuracy and high-throughput, but also nondestructive and non-contact sensing are demanded for the latest precise measurement machines. It is well known that a variety of fine structures beyond micro-meter scale are formed on the surface of industrial products. Thus it is natural trend that the demand of 3D surface measurement with nano-scale will be drastically increased. Reflecting such a situation, Mitutoyo puts much effort into the development of a variety of measurement systems which satisfy such complex demands as a comprehensive manufacturer. In this report, some of the challenges related to industrial manufacturing will be introduced.