An AlN cantilever for a wake-up switch triggered by air pressure change

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Kaiho, Y.^1,2 ; Takahashi, H.^3 ; Tomimatsu, Y.^2 ; Kobayashi, T.^4 ; Matsumoto, K.^3 ; Shimoyama, I.^3 ; Itoh, T.^1,4 ; Maeda, R.^1,4

NMEMS Technology Research Organization, Namiki 1-2-1, Tsukuba, Ibaraki, 305-8564, Japan^1

Seiko Instruments Inc., Chiba, Japan^2

University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8654, Japan^3

National Institute of Advanced Industrial Science and Technology (AIST), 1-3-1 Kasumigaseki, Chiyoda-ku, Tokyo 100-8921, Japan^4

关键词: Barometric pressure;    Differential pressures;    High sensitivity;    Low-power consumption;    Maximum output;    Output voltages;    Piezoelectric voltage;    Research reports;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012122/pdf
DOI  :  10.1088/1742-6596/476/1/012122

来源: IOP

【 摘 要 】

This research reports an AlN cantilever with an air chamber for a wake-up switch triggered by air pressure change. The proposed sensor is designed to fulfil both high sensitivity and low power consumption. By combining an air chamber to the one side of the AlN cantilever surface, the barometric pressure change generates a piezoelectric voltage. Thus, a wake-up switch triggered by air pressure change can be achieved using an AlN cantilever. The size of the fabricated AlN cantilever was 2000 μm × 1000 μm × 2 μm. The sensitivity to static differential pressure was 11.5 mV/Pa at the range of -20 Pa to 20 Pa. We evaluated the response of the sensor, which was composed of the AlN cantilever and the chamber of 60 ml in volume, when air pressure change was applied. The output voltage increased with increasing the applied air pressure change. It was observed that the maximum output voltage of 50 mV was generated when the air pressure change was 13 Pa.