Large-dynamic-range MEMS Electret Energy Harvester with Combined Gap-closing/Overlapping-area-change Electrodes

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Fu, Qianyan^1 ; Suzuki, Yuji^1

Department of Mechanical Engineering, University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo 113-8656, Japan^1

关键词: Combined electrodes;    Dynamic range;    Energy Harvester;    G acceleration;    Gap closing;    Overlapping area;    Silicon-on-insulator process;    Vibration acceleration;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012112/pdf
DOI  :  10.1088/1742-6596/476/1/012112

来源: IOP

【 摘 要 】

A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping-area-change and gap-closing types is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with the single layer silicon-on-insulator process. Soft-X-ray charging is employed to establish uniform surface potential around 60 V on vertical electrets on the sidewall of the comb fingers. Up to 1.19 μW output power has been obtained at 552 Hz and 2.15 g acceleration oscillations, which corresponds to the effectiveness as high as 27.2%.