Patternable Temperature Sensitive Paint using Eu(TTA)3 for the Micro Thermal Imaging

13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Tsukamoto, T.^1 ; Tanaka, S.^2

Micro System Integration Center, Tohoku University, 6-6-01 Aoba Aza Aramaki, Aoba-ku Sendai Miyagi, Japan^1

Department of Bioengineering and Robotics, Tohoku University, 6-6-01 Aoba Aza Aramaki, Aoba-ku Sendai Miyagi, Japan^2

关键词: Europiums (III);    Luminescent material;    Micropatterned;    Temperature sensitive paint;    Temperature sensitivity;    Thenoyltrifluoroacetone;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/476/1/012073/pdf
DOI  :  10.1088/1742-6596/476/1/012073

来源: IOP

【 摘 要 】

This paper reports a novel patternable temperature sensitive paint (PTSP) which can be photolithographically patterned. The proposed PTSP consists of europium (III) thenoyltrifluoroacetone (Eu(TTA)3) as a luminescent material and SU-8 as a photosensitive matrix. The optimal patterning condition was investigated and the PTSP microstructures as small as 2 μm were successfully patterned. The luminescence from the micro-patterned PTSP was observed and the temperature sensitivity was measured as high as -0.8%/°C.