Hard X-ray Nanoprobe with Spherical-aberration-corrected Quad-spherical-mirror Optics

11th International Conference on X-ray Microscopy

Suzuki, Yoshio^1 ; Takeuchi, Akihisa^1

JASRI/Spring-8, Koto 1-1-1 Sayo, Hyogo 679-5198, Japan^1

关键词: Focusing properties;    Grazing incidence;    Grazing incidence optics;    Kirkpatrick-Baez;    Scanning x-ray microscopy;    Spherical aberrations;    Spherical concaves;    Total reflection mirrors;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/463/1/012019/pdf
DOI  :  10.1088/1742-6596/463/1/012019

来源: IOP

【 摘 要 】

A quad-mirror system is developed for nanofocusing of hard x-ray beam. The optical system consists of four spherical-concave total-reflection mirrors. Each two mirrors are combined in a tandem-mirror configuration to compensate spherical aberrations in grazing-incidence mirror optics, and a pair of the tandem-spherical mirrors is configured in a crossed mirror system (Kirkpatrick-Baez optics) to eliminate astigmatism in grazing incidence optics. Focusing properties are tested at the beam line 20XU of SPring-8. The focused beam size measured by knife-edge scan method is 170 nm x 190 nm at 10 keV. Preliminary experiments on scanning x-ray microscopy are also carried out, and a fine structure of 100 nm-line/100 nm-space is resolved in the measured image.