Transport characteristics of N2(A3Σ+u), N(4S°), and N(2D°) in a remote nitrogen plasma source

11th Asia Pacific Conference on Plasma Science and Technology;25th Symposium on Plasma Science for Materials

Horikawa, Y.^1 ; Hayashi, T.^2 ; Sasaki, K.^3

Department of Quantum Science and Engineering, Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan^1

Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan^2

Division of Quantum Science and Engineering, Faculty of Engineering, Hokkaido University, Sapporo 060-8628, Japan^3

关键词: Absolute density;    Decay curves;    Downstream region;    Measurement positions;    Production process;    Transport characteristics;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/441/1/012009/pdf
DOI  :  10.1088/1742-6596/441/1/012009

来源: IOP

【 摘 要 】

We measured absolute densities of N2(A3Σ+u), N(4S°), and N(2D°) in the downstream region at various distances from a microwave N2plasma source. As a result, it was found that the transport of N(4S°) was highly efficient with keeping the densities on the order of 1017m-3at distances up to 12 cm from the discharge region. On the other hand, the densities of N2(A3Σ+u) and N(2D°) decayed from 1016to 1014m-3when the distance between the discharge region and the measurement position was lengthened from 6 to 12 cm. The decay curves of the N2(A3Σ+u) and N(2D°) densities were different each other. The densities of N2(A3Σ+u) and N(2D°) in the downstream region were not owing to the transports but were due to their productions. We discussed the dominant production processes of N2(A3Σ+u) and N(2D°) on the basis of the experimental observations.