Experimental Study of Electrochemical Micro-milling of Silicon

2019 3rd International Workshop on Renewable Energy and Development

能源学;生态环境科学

Hui, Chen^1

College of Mechanical and Electrical Engineering, Central South University of Forestry and Technology, Changsha

410004, China^1

关键词: Electrochemical machining;    Milling process;    Processing accuracies;    Silicon materials;    Silicon micromachining;    Sodium hydroxide solutions;    Three-dimensional processing;    Three-dimensional structure;   

Others  :  https://iopscience.iop.org/article/10.1088/1755-1315/267/6/062058/pdf
DOI  :  10.1088/1755-1315/267/6/062058

学科分类：环境科学（综合）

来源: IOP

【 摘 要 】

Electrochemical machining (ECM) is a common method of silicon micromachining, but it is difficult to be directly used for three-dimensional processing. Therefore a new electrochemical micro-milling (ECMM) method is proposed. The method combined electrochemical machining and milling processes technology. Micro-removal of materials can be achieved by electrochemical machining technique, while milling processes enable three-dimensional machining. ECMM utilizes the passivation of silicon in sodium hydroxide solution to reduce electrochemical stray corrosion and improve processing accuracy. Experiments showed that the ECMM technology can limit the electrochemical stray corrosion to less than 10 μm. This method can be used for the machining of tiny three-dimensional structures of silicon materials.