Force and resolution analysis in Kelvin probe force microscopy using nanotube probes

International Conference on Manufacturing Technology, Materials and Chemical Engineering

材料科学;化学工业

Xu, Jie^1 ; Chen, Jianfeng^1 ; Chen, Long^1 ; Cai, Yuanlingyun^1 ; Yu, Tianqi^1 ; Li, Jinze^1

College of Electronic and Optical Engineering, College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing

210023, China^1

关键词: Force analysis;    ITS applications;    Kelvin probe force microscopy;    Nanotube probes;    Resolution analysis;    Sharp tip;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/592/1/012036/pdf
DOI  :  10.1088/1757-899X/592/1/012036

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Multiple approaches have been exploited to improve the resolution and sensitivity of Kelvin probe force microscopy (KPFM), among which an apparent method is to use probes with sharp tip apex or with nanotube attached. In this paper, the electrostatic force in KPFM with nanotube probe was calculated by Green's function theorem and boundary element method. Based on the force analysis, the sensitivity and resolution of KPFM using ordinary and nanotube probes were further quantitatively compared with each other. It was found that KPFM measurement with nanotube probe had a better resolution, however, the sensitivity deteriorated under air condition that might constrain its applications.