Angle resolve x-ray photoelectron spectroscopy analysis of La2O3 thin film of mixed carbon-glass and carbon-silicon substrate for micro-flexographic printing process

International Nuclear Science, Technology and Engineering Conference 2018

Hassan, S.^1 ; Yusof, M.S.^1 ; Embong, Z.^2

Faculty of Mechanical and Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, Batu Pahat, Johor

86400, Malaysia^1

Faculty of Applied Sciences and Technology, Universiti Tun Hussein Onn Malaysia, Km. 1, Jln. Panchor, Panchor, Johor

84600, Malaysia^2

关键词: Adhesive properties;    Biomedical devices;    Electron binding energy;    Flexographic printing;    Micro-electronic devices;    Patterning techniques;    Silicon substrates;    Surface chemical properties;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/555/1/012027/pdf
DOI  :  10.1088/1757-899X/555/1/012027

来源: IOP

【 摘 要 】

Adhesive property could be described as an interchangeably with some ink and substrate which was applied to one surface of two separate items that bonded together. Lanthanum oxide (La2O3) had been used as a rare earth metal candidate as printing ink. This metal deposit was printed on carbon-silicon substrate and carbon-glass substrate using Magnetron Sputtering technique. The choose of Lanthanum Oxide as a target is due to its wide application in producing micro-electronic devices such as thin film battery, electronic circuit and printed circuit board. The La2O3 was deposited on the surface of carbon-silicon and carbon-glass substrate were then analyzed using Angle Resolve X-Ray Photoelectron Spectroscopy (ARXPS). The position for each synthetic component in the narrow scan of Lanthanum (La) 3d and O 1s were referred to the electron binding energy (eV). This research was focused on the narrow scan regions which were O 1s and La 3d. Further discussion of the spectrum evaluation was discussed in detail. Here, it was proposed that from the adhesive and surface chemical properties of La was suitable as an alternative medium for micro-flexographic printing technique in printing multiple fine solid lines image at micro to nano scale feature. Micro-flexographic printing was developed in patterning technique from micron to nano scale range to be used for graphic, electronic and bio-medical device on variable substrates. Hence, this paper will describe the capability of this particular metal as rare earth metal in a practice of micro-flexographic printing process.