Method of crack-free laser writing of microchannels on glass substrates

International Workshop "Advanced Technologies in Material Science, Mechanical and Automation Engineering – MIP: Engineering – 2019"

材料科学;机械制造;原子能学

Baev, Sergey^1 ; Bessmeltsev, Victor^1 ; Goloshevsky, Nikolay^1 ; Katasonov, Denis^1

Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 1 Acad. Koptyuga Pr., Novosibirsk

630090, Russia^1

关键词: Beam trajectories;    Energy characteristics;    Fragile materials;    Glass substrates;    Laser micro-machining;    Longitudinal cracks;    Vector scanning;    Write structure;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/537/2/022059/pdf
DOI  :  10.1088/1757-899X/537/2/022059

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Approaches to the problem of the formation of microchannels of arbitrary shape on optical glass substrates and other fragile materials without microdefects (cracks and chips) both on the surface of the substrate and inside the substrates are considered. Different approaches to the formation of laser beam trajectories within microchannels are considered. It was found that the raster scanning method improves the performance of the laser micromachining process and provides the ability to write structures of any length without longitudinal cracks with the energy characteristics of the laser spot in the focus much higher than those in the vector scanning method.